TGQ calibration gratings are intended for simultaneous calibration in X, Y, and Z directions, lateral calibration of AFM scanners, and detection of lateral nonlinearity, hysteresis, creep and cross-coupling effects.
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Chemical Vapor Deposition (CVD) method is an excellent solution for providing high quality characteristics, including imperviousness, high purity, perfect grain structure, stability, and increased hardness compared to other coating methods.
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6H-SiC(0001) based calibration sample is designed to perform easy calibrations of AFM scanner vertical movement in several nanometers interval.
