Full set of calibration standards for AFM simultaneous calibration in X, Y, and Z directions; submicron SPM calibration in X or Y direction; lateral and vertical calibration. This set includes TGZ1, TGZ2, TGZ3, TGX1, TGG1, TGT1, and TGQ1.
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Description
6H-SiC(0001) based calibration sample is designed to perform easy calibrations of AFM scanner vertical movement in several nanometers interval.
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Description
TGQ calibration gratings are intended for simultaneous calibration in X, Y, and Z directions, lateral calibration of AFM scanners, and detection of lateral nonlinearity, hysteresis, creep and cross-coupling effects.
