Full set of calibration standards for AFM simultaneous calibration in X, Y, and Z directions; submicron SPM calibration in X or Y direction; lateral and vertical calibration. This set includes TGZ1, TGZ2, TGZ3, TGX1, TGG1, TGT1, and TGQ1.
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Description
TGX calibration gratings are intended for lateral calibration of AFM scanners, detection of lateral nonlinearity, hysteresis, creep and cross-coupling effects, and determination of the tip aspect ratio.
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Description
Diffraction grating TDG01 is intended for submicron calibration scanning probe microscopes (SPM) in the X or Y direction.
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Description
Grating set for Z-axis SPM calibration with three different height ranges – 20nm, 110nm, 520nm. This set includes TGZ1, TGZ2, and TGZ3.
