Grating set for Z-axis SPM calibration with three different height ranges – 20nm, 110nm, 520nm. This set includes TGZ1, TGZ2, and TGZ3.
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Description
TGG calibration gratings are intended for AFM calibration in X or Y axis, detection of lateral and vertical scanner nonlinearity, detection of angular distortion, and tip characterization.
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Description
TGZ calibration grating series are intended for Z-axis calibration of scanning probe microscopes (SPM) and nonlinearity measurements.
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Description
6H-SiC(0001) based calibration sample is designed to perform easy calibrations of AFM scanner vertical movement in several nanometers interval.
