Grating set for Z-axis SPM calibration with four different height ranges – 20nm, 110nm, 520nm, 1400nm. This set includes TGZ1, TGZ2, TGZ3, and TGZ4.
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Description
TGQ calibration gratings are intended for simultaneous calibration in X, Y, and Z directions, lateral calibration of AFM scanners, and detection of lateral nonlinearity, hysteresis, creep and cross-coupling effects.
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6H-SiC(0001) based calibration sample is designed to perform easy calibrations of AFM scanner vertical movement in several nanometers interval.
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TGG calibration gratings are intended for AFM calibration in X or Y axis, detection of lateral and vertical scanner nonlinearity, detection of angular distortion, and tip characterization.
