TGZ calibration grating series are intended for Z-axis calibration of scanning probe microscopes (SPM) and nonlinearity measurements.
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Grating set for Z-axis SPM calibration with three different height ranges – 20nm, 110nm, 520nm with PTB traceable certificate. This set includes TGZ1, TGZ2, and TGZ3.
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TGT calibration gratings allow users to visualize scanning tips in 3-D, determine tip sharpness parameters (aspect ratio and curvature radius), tip degradation and contamination control.