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Test pattern for Piezoresponce Force Microscopy
TGT calibration gratings allow users to visualize scanning tips in 3-D, determine tip sharpness parameters (aspect ratio and curvature radius), tip degradation and contamination control.
Diffraction grating TDG01 is intended for submicron calibration scanning probe microscopes (SPM) in the X or Y direction.
6H-SiC(0001) based calibration sample is designed to perform easy calibrations of AFM scanner vertical movement in several nanometers interval.