Test pattern for Piezoresponce Force Microscopy
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Description
TGZ calibration grating series are intended for Z-axis calibration of scanning probe microscopes (SPM) and nonlinearity measurements.
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Diffraction grating TDG01 is intended for submicron calibration scanning probe microscopes (SPM) in the X or Y direction.
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Chemical Vapor Deposition (CVD) method is an excellent solution for providing high quality characteristics, including imperviousness, high purity, perfect grain structure, stability, and increased hardness compared to other coating methods.
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Description
Full set of calibration standards for AFM simultaneous calibration in X, Y, and Z directions; submicron SPM calibration in X or Y direction; lateral and vertical calibration. This set includes TGZ1, TGZ2, TGZ3, TGX1, TGG1, TGT1, and TGQ1.