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Test pattern for Piezoresponce Force Microscopy
Diffraction grating TDG01 is intended for submicron calibration scanning probe microscopes (SPM) in the X or Y direction.
Polycrystalline Sapphire Substrate.
TGX calibration gratings are intended for lateral calibration of AFM scanners, detection of lateral nonlinearity, hysteresis, creep and cross-coupling effects, and determination of the tip aspect ratio.
TGZ calibration grating series are intended for Z-axis calibration of scanning probe microscopes (SPM) and nonlinearity measurements.