Grating set for SPM lateral and vertical calibration. This set includes TGZ1, TGZ2, TGZ3, TGX1, TGG1, and TGT1.
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Description
TGG calibration gratings are intended for AFM calibration in X or Y axis, detection of lateral and vertical scanner nonlinearity, detection of angular distortion, and tip characterization.
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Description
6H-SiC(0001) based calibration sample is designed to perform easy calibrations of AFM scanner vertical movement in several nanometers interval.
