TGZ calibration grating series are intended for Z-axis calibration of scanning probe microscopes (SPM) and nonlinearity measurements.
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Full set of calibration standards for AFM simultaneous calibration in X, Y, and Z directions; submicron SPM calibration in X or Y direction; lateral and vertical calibration. This set includes TGZ1, TGZ2, TGZ3, TGX1, TGG1, TGT1, and TGQ1.
