TGZ - AFM Calibration Grating
TGG - AFM Calibration Grating
TGT - AFM Calibration Grating
TGX - AFM Calibration Grating

Grating set for SPM lateral and vertical calibration. This set includes TGZ1, TGZ2, TGZ3, TGX1, TGG1, and TGT1.

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