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6H-SiC(0001) based calibration sample is designed to perform easy calibrations of AFM scanner vertical movement in several nanometers interval.
TGZ3
Description
TGZ calibration grating series are intended for Z-axis calibration of scanning probe microscopes (SPM) and nonlinearity measurements.
PFM03
Test pattern for Piezoresponce Force Microscopy
Grating set for SPM lateral and vertical calibration. This set includes TGZ1, TGZ2, TGZ3, TGX1, TGG1, and TGT1.
TGZ2