Description
6H-SiC(0001) based calibration sample is designed to perform easy calibrations of AFM scanner vertical movement in several nanometers interval. The simplicity of the calibration process is provided by nearly uniform distribution of either half-monolayer high (0.75 nm) or monolayer high (1.5 nm) stepson the sample surface demonstrating chemical and mechanical stability. The step height corresponds to half of the lattice constant of 6H-SiC crystal in 0001 direction.