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TGG calibration gratings are intended for AFM calibration in X or Y axis, detection of lateral and vertical scanner nonlinearity, detection of angular distortion, and tip characterization.
Full set of calibration standards for AFM simultaneous calibration in X, Y, and Z directions; submicron SPM calibration in X or Y direction; lateral and vertical calibration. This set includes TGZ1, TGZ2, TGZ3, TGX1, TGG1, TGT1, and TGQ1.