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Chemical Vapor Deposition (CVD) method is an excellent solution for providing high quality characteristics, including imperviousness, high purity, perfect grain structure, stability, and increased hardness compared to other coating methods.
TGT calibration gratings allow users to visualize scanning tips in 3-D, determine tip sharpness parameters (aspect ratio and curvature radius), tip degradation and contamination control.
Chemical Vapor Deposition (CVD) method is an excellent solution for providing high quality characteristics, including imperviousness, high purity, perfect grain structure, stability, and increased hardness compared to other coating methods.
Grating set for Z-axis SPM calibration with three different height ranges – 20nm, 110nm, 520nm with PTB traceable certificate. This set includes TGZ1, TGZ2, and TGZ3.