Si wafer, the grating is formed on the layer of SiO2

Modes and Applications Adhesion Force Imaging (Spectroscopy) (0) Atomic Force Acoustic Microscopy (AFAM) (0) Conductive AFM (CAFM) (0) Contact (0) Critical Dimension (CDAFM) (0) Electrical (0) Electrostatic Force Microscopy (EFM) (0) Force Modulation (0) General Topography (0) Hardened/Enhanced Wear Resistance (0) High Aspect Ratio (0) High Resolution Imaging (0) Kelvin Probe Microscopy (0) Lateral Force Microscopy (LFM) (0) Life Sciences (0) Liquid Scanning (0) Magnetic Force Microscopy (MFM) (0) Mechanical Properties/Force Curves (0) Nanoindentation and Lithography (0) Non-Contact/Tapping (0) Optical Properties (0) Phase Imaging Mode (0) Piezoresponse/ Piezoforce Microscopy (PFM) (0) Scanning Capacitance Mode (SCM) (0) Scanning Electrochemical Potential Microscopy (SECPM) (0) Scanning Near-field Optical Microscopy (SNOM) (0) Scanning Spreading Resistance Mode (SSRM) (0) Scanning Thermal Microscopy (SThM) (0) Scanning Tunneling Microscopy (STM) (0) Spectroscopy (0) Surface Potential Microscopy (SPoM) (0) Torsional Resonance (TR) (0) Trenches/Holes (0)