TGX calibration gratings are intended for lateral calibration of AFM scanners, detection of lateral nonlinearity, hysteresis, creep and cross-coupling effects, and determination of the tip aspect ratio.
TGQ calibration gratings are intended for simultaneous calibration in X, Y, and Z directions, lateral calibration of AFM scanners, and detection of lateral nonlinearity, hysteresis, creep and cross-coupling effects.