Grating set for Z-axis SPM calibration with three different height ranges – 20nm, 110nm, 520nm. This set includes TGZ1, TGZ2, and TGZ3.
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Description
Grating set for SPM lateral and vertical calibration. This set includes TGZ1, TGZ2, TGZ3, TGX1, TGG1, and TGT1.
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Description
TGZ calibration grating series are intended for Z-axis calibration of scanning probe microscopes (SPM) and nonlinearity measurements.
