Grating set for Z-axis SPM calibration with three different height ranges – 20nm, 110nm, 520nm. This set includes TGZ1, TGZ2, and TGZ3.
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Grating set for Z-axis SPM calibration with three different height ranges – 20nm, 110nm, 520nm with PTB traceable certificate. This set includes TGZ1, TGZ2, and TGZ3.
