TGQ calibration gratings are intended for simultaneous calibration in X, Y, and Z directions, lateral calibration of AFM scanners, and detection of lateral nonlinearity, hysteresis, creep and cross-coupling effects.
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- Size 7 × 7 mm
- Quality ZYA
- Working Side Single
- Top Working Layer Mosaic Spread 0.3-0.5 degree
- Thickness of working layer2 0.6mm (0.4-0.7)
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Description
Grating set for Z-axis SPM calibration with three different height ranges – 20nm, 110nm, 520nm. This set includes TGZ1, TGZ2, and TGZ3.
