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TGQ calibration gratings are intended for simultaneous calibration in X, Y, and Z directions, lateral calibration of AFM scanners, and detection of lateral nonlinearity, hysteresis, creep and cross-coupling effects.
Grating set for Z-axis SPM calibration with three different height ranges – 20nm, 110nm, 520nm with PTB traceable certificate. This set includes TGZ1, TGZ2, and TGZ3.
Chemical Vapor Deposition (CVD) method is an excellent solution for providing high quality characteristics, including imperviousness, high purity, perfect grain structure, stability, and increased hardness compared to other coating methods.