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Calibration grating for 2-D and 3-D calibration
TGZ calibration grating series are intended for Z-axis calibration of scanning probe microscopes (SPM) and nonlinearity measurements.
6H-SiC(0001) based calibration sample is designed to perform easy calibrations of AFM scanner vertical movement in several nanometers interval.
TGG calibration gratings are intended for AFM calibration in X or Y axis, detection of lateral and vertical scanner nonlinearity, detection of angular distortion, and tip characterization.