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Diffraction grating TDG01 is intended for submicron calibration scanning probe microscopes (SPM) in the X or Y direction.
K-TEK Nanotechnology supplies the full line of calibration standards for SPM lateral and vertical calibration, detection of lateral non-linearity, hysteresis, creep and cross-coupling effects, and determination of the tip shape.
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Glass Wafer. The grating is formed on the layer of chalcagenid glass. The grating top surface is aluminum (thickness 80-110 nm)
1-Dimensional (in the X or Y direction)
278 nm (3600 periods/mm)
Diameter 12.5mm, thickness 2.5 mm
Central diameter 9 mm
> 55 nm and provides good image contrast
± 1 nm