Grating set for SPM lateral and vertical calibration. This set includes TGZ1, TGZ2, TGZ3, TGX1, TGG1, and TGT1.
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Description
TGQ calibration gratings are intended for simultaneous calibration in X, Y, and Z directions, lateral calibration of AFM scanners, and detection of lateral nonlinearity, hysteresis, creep and cross-coupling effects.
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Description
TGX calibration gratings are intended for lateral calibration of AFM scanners, detection of lateral nonlinearity, hysteresis, creep and cross-coupling effects, and determination of the tip aspect ratio.
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Description
TGZ calibration grating series are intended for Z-axis calibration of scanning probe microscopes (SPM) and nonlinearity measurements.
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Description
TGZ calibration grating series are intended for Z-axis calibration of scanning probe microscopes (SPM) and nonlinearity measurements.