Scalloped Aluminum Grating

Scalloped Aluminum Grating for AFM reference and calibration standard in XY plane

Scalloped Aluminum Grating (SAG) is a high-precision hexagonal surface structure that can be used as an AFM reference and calibration standard in XY plane. Unlike expensive submicron gratings manufactured by lithography methods, SAG has repeatable and reproducible self-organized ordered structure with periodicity determined by the conditions of a simple electrochemical process.

$1.00$100.00

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Specifications

SAG-102 SAG-65
Pitch Average 102.5 nm 65 nm
Accuracy of pitch average* 0.5 nm 0.3 nm
HWHM of pitch distribution 6.5 nm 6 nm
Average profile heigth 38 nm 24 nm
Domain structure  Polydomain
Domain size** 4 µm 2.4 µm
Pattern  Dense hexagonal package within single domain
Material  Aluminum
Substrate  Al dice 7 nm diameter
Active Area  4 nm diameter
Pieces per pack  4 ea

*Pitch accuracy is specified as the standard deviation of the average value obtained from statistical analysis of SEM images. More than 10concaves are analyzed.
**Weighted mean value over more than 500 domains is given.

Additional Information

Scalloped Aluminum Grating (SAG) is a high-precision hexagonal surface structure that can be used as an AFM reference and calibration standard in XY plane. Unlike expensive submicron gratings manufactured by lithography methods, SAG has repeatable and reproducible self-organized ordered structure with periodicity determined by the conditions of a simple electrochemical process. It has two options for the pitch that provide the formation of large honeycomb domains (Fig. 1 & 2); the average periodicity within the domains is 102.5±0.5nm (SAG-102) or 65±0.3nm (SAG-65), which is statistically derived over large areas of a number of domains.

 

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SAG is a 100nm scale grating with naturally formed sharp and high aspect ratio features on its surface. The hexagonal pattern consists of concaves and spikes. Each concave is surrounded by six spikes. The shape of the spikes can be approximated by triangular pyramids with a height of about 30nm and an apex radius of about 5nm. Though the in-plane orientation of the pyramids may be different, no distinguishable difference in height or apex radius of the Al spikes situated on various defect-free domains can be observed. Because of the extremely sharp apexes of the pyramids, their experimentally observed radii on AFM scans exhibit the sharpness of the AFM tip. Tapping mode is the preferred method for AFM tests to avoid damage to the tip or the grating.

Scalloped Aluminum Grating (SAG) is a hexagonal structure formed by electrochemical processing of high purity Al. Two-dimensional hexagonal packaging can be observed within surface domains containing 1500 concaves in average (Fig. 4). There are two options for the pitch of the grating, each providing accuracy (HWHM of inter-concave distance) of about 6nm.

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Details Price QTY
SAG-102
Pitch: 102.5 nm
$100.00
SAG-65
Pitch: 65 nm
$100.00
SAG
Pitch:
$1.00