Scalloped Aluminum Grating (SAG) is a high-precision hexagonal surface structure that can be used as an AFM reference and calibration standard in XY plane. Unlike expensive submicron gratings manufactured by lithography methods, SAG has repeatable and reproducible self-organized ordered structure with periodicity determined by the conditions of a simple electrochemical process.
*Pitch accuracy is specified as the standard deviation of the average value obtained from statistical analysis of SEM images. More than 105 concaves are analyzed.
**Weighted mean value over more than 500 domains is given.