Specifications
Cantilever | Length |
Width |
Thickness |
Resonant Frequency kHz Force Constant Nm | |||||
---|---|---|---|---|---|---|---|---|---|
± 10μm |
± 5μm |
± 0.5μm |
Min |
Typical |
Max |
Min |
Typical |
Max |
|
NN-HAR-CM13Contact Mode | 450 | 50 | 2 | 9 | 13 | 17 | 0.07 | 0.2 | 0.4 |
NN-HAR-CM28Contact Mode | 225 | 50 | 2 | 20 | 28 | 35 | 0.4 | 0.6 | 1 |
NN-HAR-T300Tapping Mode | 125 | 40 | 4 | 200 | 300 | 400 | 25 | 40 | 75 |
NN-HAR-FM60Force Modulation Mode | 225 | 30 | 2 | 45 | 60 | 75 | 1 | 3 | 7 |
Cantilever Specifications
Material | Single Crystal Silicon |
Cantilever Shape Cross-Section | CM28, T300, FM60: Rectangular/Trapezoidal CM13: Beam |
Number of Cantilevers | 1 |
Coating | CM28, T300, FM60: Au reflex (on non-tip side) CM13: Au reflex (on both sides) |
Chip Size | 3400 µm (L) x 1600 µm (W) x 300 µm (T) |
Tip Specifications
Needle Material | Ag2Ga |
Tip Height | CM28, T300, FM60: 14 μm (not including needle) CM13: 17 μm (not including needle) |
Tip Offset (Setback) | 15 – 25 μm |
Tip Curvature Radius | CM28: 20-100 nm (25 nm typical) CM13, T300, FM60: 20-100 nm (50 nm typical) |
Needle Length | CM28: 4-7 µm (5 µm typical) CM13, T300, FM60: 1-13 µm |
Needle Diameter | 50 nm |
Needle Angle | 7°-15° (12° typical) |
Needle Electrical Resistivity | 1 – 1.1 x 10-7 Ωm (1.05 x 10-7 Ωm typical) |
Electric Resistance of Tip & Cantilever | CM28: 50-80 Ω CM13, T300, FM60: 1-3 µm – 15-45 Ω, 4-7 µm – 50-80 Ω, 7-13 µm – 80-120 Ω |