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AFM Calibration

K-Tek Nanotechnology supplies full line of calibration standards for SPM lateral and vertical calibration, detection of lateral non-linearity, hysteresis, creep and cross-coupling effects, and determination of the tip shape.

$99.00$297.00

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Specifications

TGZ Series

TGZ calibration grating series are intended for Z-axis calibration of scanning probe microscopes (SPM) and nonlinearity measurements.

Structure Si wafer, the grating is formed on the layer of SiO2
Pattern Types 1-Dimensional (Z-axis direction)
Period 3.00 ± 0.05 µm
Chip Size 5 x 5 x 0.5 mm
Effective Area Central square 3 x 3 mm
Step Height TGZ1: 20 ± 1.5 nm
TGZ2: 110 ± 2 nm
TGZ3: 520 ± 3 nm
TGZ4: 1400 ± 10 nm
TGQ Series

TGQ calibration gratings are intended for simultaneous calibration in X, Y, and Z directions, lateral calibration of AFM scanners, and detection of lateral nonlinearity, hysteresis, creep and cross-coupling effects.

Structure The grating is formed on Si wafer top surface
Pattern Types 3-Dimensional array of rectangles
Edge Angle 70° ± 2°
Edge Radius ≤ 10 nm
Period 3.00 ± 0.05 µm
Chip Size 5 x 5 x 0.5 mm
Effective Area Central square 3 x 3 mm
Height 20 nm ± 1.5 nm
Rectangle Side Sizes  1.5 ± 0.35 µm
TGT Series

TGT calibration gratings allow users to visualize scanning tips in 3-D, determine tip sharpness parameters (aspect ratio and curvature radius), tip degradation and contamination control.

Structure The grating is formed on Si wafer top surface
Pattern Types Array of sharp tips
Edge Angle 70° ± 2°
Edge Radius ≤ 10 nm
Period 3.00 ± 0.05 µm
Chip Size 5 x 5 x 0.5 mm
Effective Area Central square 2 x 2 mm
Height 0.3 – 0.7 µm
Diagonal Period 2.12 µm
TGX Series

TGX calibration gratings are intended for lateral calibration of AFM scanners, detection of lateral nonlinearity, hysteresis, creep and cross-coupling effects, and determination of the tip aspect ratio.

Structure The grating is formed on Si wafer top surface
Pattern Types Chessboard-like array of square pillars with sharp undercut edges
Edge Curvature ≤ 10 nm
Period 3.00 ± 0.05 µm
Chip Size 5 x 5 x 0.5 mm
Effective Area Central square 3 x 3 mm
Height 0.3 – 0.6 µm
TGG Series

TGG calibration gratings are intended for AFM calibration in X or Y axis, detection of lateral and vertical scanner nonlinearity, detection of angular distortion, and tip characterization.

Structure The grating is formed on Si wafer top surface
Pattern Types 1-Dimensional array of triangular steps (X or Y direction) having precise linear and angular sizes
Edge Angle 70° ± 2°
Edge Radius ≤ 10 nm
Period 3.00 ± 0.05 µm
Chip Size 5 x 5 x 0.5 mm
Effective Area Central square 3 x 3 mm

Additional Information

Details Price QTY
TGZ1
Series: TGZ - Step height 20±1.5 nm
$110.00 $99.00
TGZ2
Series: TGZ - Step height 110±2 nm
$110.00 $99.00
TGZ3
Series: TGZ - Step height 520±3 nm
$110.00 $99.00
TGZ4
Series: TGZ - Step height 1400±10 nm
$110.00 $99.00
TGQ1
Series: TGQ
$330.00 $297.00
TGT1
Series: TGT
$330.00 $297.00
TGX1
Series: TGX
$220.00 $198.00
TGG1
Series: TGG
$220.00 $198.00